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Parameters | DL-2000H | Remarks |
Size of vacuum chamber | ∅2000*1400 mm | Diameter & Height |
Vacuum chamber type | Vertical | |
Door | Inspection window | Single or double door |
Ultimate pressure | 7.8×10⁻⁴ Pa | Unload |
Vacuum system | Molecular pump + roots pump + holding pump | |
Working Vacuum | 7.0×10⁻² Pa≤10min | (Unload: 10min Full load≤11min) |