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Structure | Vertical box-type structure with front opening (chamber inner size: Φ2100 mm × 1700 mm) |
Maximal Baking Temperature | 350 °C |
Normal Working Temperature | Room temperature to 300 °C |
Vacuum System | Primary pumps consisting of molecular pump diffusion pump + backing pump ,pneumatic valve, etc. |
Ultimate Pressure | 3.0 × 10⁻⁴ Pa |
Working Pressure | Attaining 4.0 × 10⁻³ Pa in 15 minutes after exposure |
Evaporation Source | Single E-beam or beam gun resistance-heated source |
Ion Source | Hall ion source/Kaufman ion source optional |
Cryochiller | 12P or 15P optional -135 °C as minimum temperature |
Safety Device | Electric bonding and limit switch on chamber door |
Deposition Controller | INFICON SQC-310 |
Others | Operation panel of 9-inch GUI blackout resume automated control of vacuum/continuous coating system |
The ZZS-Serie Optics Coating Machine represents a sophisticated approach to thin-film deposition, designed specifically for facilities that demand rigorous consistency, operational flexibility, and long-term reliability. By integrating advanced vacuum technology with intelligent control systems, this platform addresses the complex challenges of modern optical manufacturing. The following sections detail the core capabilities and structural advantages that make this equipment a vital asset for scaling production and achieving superior coating results.
The ZZS-Serie is engineered to deliver exceptional film density and precise temperature drift control, addressing the most demanding requirements in modern optical manufacturing. By maintaining a thickness uniformity error strictly within 0.5%, this equipment guarantees that every batch meets exact specifications, eliminating costly rework and material waste. Operators will notice the consistent physical clarity and structural integrity of the deposited layers, which stand up to rigorous environmental stress testing without delamination or degradation. This level of precision translates directly into higher yield rates, ensuring that large-scale production runs maintain the exact same optical characteristics from the first chamber cycle to the last.
Recognizing that production lines must adapt rapidly to shifting market demands, the system utilizes a highly adaptable building-block modular architecture. Facilities can easily configure the chamber with single rotation, planetary, or flip fixtures depending on the specific geometry and volume of the substrates being processed. The inclusion of both front and back baking modes further expands the processing capabilities, allowing for specialized thermal treatments. During operation, the mechanical transitions of the flip fixtures are remarkably smooth, while the rotation mechanisms operate with a quiet, balanced precision that minimizes internal vibration. This flexibility minimizes the need for multiple specialized machines, optimizing floor space and maximizing overall operational efficiency.
Modern production environments require intelligent oversight, and this equipment integrates a comprehensive one-button fully automated operating system to streamline daily workflows. Through a responsive 9-inch graphical user interface, operators experience crisp, immediate feedback when initiating complex deposition sequences. The system supports remote monitoring via PC and mobile platforms, allowing facility managers to track real-time vacuum levels, temperature curves, and deposition rates from any location. Furthermore, the ability to rapidly import film system parameters directly via Excel files removes the risk of manual data entry errors. This intelligent control architecture drastically reduces operator fatigue and accelerates the transition between different production recipes.
The internal architecture is built upon a foundation of premium components sourced from internationally recognized supply chains. By integrating critical parts from industry leaders such as Inficon, Edwards, and Omron, the machine achieves exceptional long-term stability and a remarkably low failure rate. The deep, steady draw of the primary molecular and diffusion vacuum pumps ensures rapid chamber evacuation, while the precise sensing capabilities of the Inficon SQC-310 deposition controller maintain exact material thickness throughout the coating cycle. Users can rely on the reassuring, solid engagement of the Omron relays and pneumatic valves, knowing that the core infrastructure is designed for continuous, heavy-duty industrial operation without unexpected interruptions or costly downtime.
This versatile platform is tailored for a wide spectrum of specialized optical and industrial applications. The precise environmental controls and versatile evaporation sources make it an ideal solution for depositing complex multi-layer structures across various substrate materials.
AR (Anti-Reflective) Coatings: Enhancing light transmission and reducing glare for precision lenses, optical instruments, and display panels.
UV/IR Cut Filters: Providing critical wavelength management for digital imaging sensors, security cameras, and analytical instruments.
AF (Anti-Fingerprint) Films: Delivering durable, smudge-resistant tactile surfaces that improve the user experience on touchscreens and consumer electronics.
Industrial Dielectric Films: Creating highly durable, specialized protective layers for advanced manufacturing components that require strict environmental resistance.
Beyond the physical hardware, the ZZS-Serie comes with comprehensive turnkey technical support and process delivery to ensure immediate productivity. Our engineering team provides end-to-end service, encompassing initial process development, precise system calibration, and detailed thin-film characterization tailored to your specific requirements. The machine arrives with pre-set, mature mass production processes loaded into the controller, allowing facilities to initiate manufacturing almost immediately after installation. This complete handover strategy minimizes equipment downtime, significantly shortens the learning curve for operators, and accelerates the time-to-market for new optical products, ensuring a rapid return on investment.
