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ZZS-Serie Optics Coating Machine

This series is specially designed for the coating of precision optics instruments. Both the individual modules and overall structure of the coating machines fully satisfy the technical requirements for optical thin film manufacturing, especially, suitable for films such as AR, AF etc. Equipped with high precision thickness control system, efficient beam gun and automatic coating control system, machines of this series are ideal for optical thin film coating.

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ZZS-Serie optics coating machine

Product Description

Structure	Vertical box-type structure with front opening (chamber inner size: Φ2100 mm × 1700 mm)
Maximal Baking Temperature	350 °C
Normal Working Temperature	Room temperature to 300 °C
Vacuum System	Primary pumps consisting of molecular pump diffusion pump + backing pump ,pneumatic valve, etc.
Ultimate Pressure	3.0 × 10⁻⁴ Pa
Working Pressure	Attaining 4.0 × 10⁻³ Pa in 15 minutes after exposure
Evaporation Source	Single E-beam or beam gun resistance-heated source
Ion Source	Hall ion source/Kaufman ion source optional
Cryochiller	12P or 15P optional -135 °C as minimum temperature
Safety Device	Electric bonding and limit switch on chamber door
Deposition Controller	INFICON SQC-310
Others	Operation panel of 9-inch GUI blackout resume automated control of vacuum/continuous coating system