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Vacuum chamber type | Separated structure |
Body size | Box front door: size is about Φ550×620MM, SUS304 Materials |
Ultimate pressure | 3.0×10⁻⁴Pa |
Recovery vacuum pressure | Atmosphere → 3.0×10⁻³Pa≤15min |
Vacuum system configuration | Molecular pump, direct connection pump, valve and pipeline |
Vacuum gauge controller | Digital display automatic vacuum measuring instrument (resistance gauge + metal ionization gauge) |
Operation system(touch screen) | Automatic PLC/Manual |
Evaporation source | Resistance evaporation source and other components |